Contact-free experimental determination of the static flexural spring constant of cantilever sensors using a microfluidic force tool

• John D. Parkin and
• Georg Hähner

Beilstein J. Nanotechnol. 2016, 7, 492–500, doi:10.3762/bjnano.7.43

• micro- and nanocantilever sensors, experimental techniques that do not require contact between the sensor and a surface at some point during the calibration process are still the exception rather than the rule. We describe a noncontact method using a microfluidic force tool that produces accurate forces

• and demonstrate that this, in combination with a thermal noise spectrum, can provide the static flexural spring constant for cantilever sensors of different geometric shapes over a wide range of spring constant values (≈0.8–160 N/m). Keywords: AFM; cantilever sensors; microfluidic force tool; spring

• resulting forces, the channel height could be reduced for spring constant values <1 N/m and increased for cantilevers with spring constants >100 N/m. Microfluidic force tool In the current experiments the specific alignment of the cantilevers relative to the channel exit was chosen for reasons of confidence